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(2) Research on Negative Film

Currently, the negative electrode film of all solid-state thin film lithium-ion batteries mostly uses metallic lithium film.

Lithium metal has the advantages of low potential and high specific capacity, while its disadvantages of poor safety and large charge discharge deformation are almost ignored due to the thin film electrode. However, considering the future use of all solid-state thin film lithium-ion batteries in microelectronics, using lithium film as the negative electrode cannot withstand the heating temperature of reflow soldering (lithium melting point l80.5 ℃, reflow soldering temperature 245 ℃). Therefore, Researchers in thin film lithium-ion batteries have also conducted a lot of research on new negative electrodes.

Tin based materials have a high melting point, can withstand reflow soldering temperature, and have low preparation environment requirements, making them one of the most studied thin film negative electrodes. The SnO3 thin film negative electrode has a high initial discharge capacity, but it decays to 29% in the second cycle. The initial specific capacity of the negative electrode reaches 100uAh/cm2, but it decays quickly, and can only maintain 3uAh/cm2 after 100 cycles. This may be due to the inability of the thin film electrode to effectively suppress the contraction and aggregation of tin oxide after being made.

Silicon has a theoretical specific capacity of up to 4200mAh/g (LioSi), therefore, the research on silicon based negative electrode films has always been a hot topic in the field of thin film negative electrode research. Two types of silicon alloy films, CoSie and CoSib2, were prepared using Co and Si targets by electron beam evaporation. Both films exhibited good electrochemical performance, but the Si content in the alloy caused a certain decrease in capacity after cycling. The MgsSi film anode was prepared by Pulsed laser deposition. The specific capacity of the film electrode reached 2000mAh/g in the range of 0.1~1V (vs. Li), and there was no clear attenuation after more than 100 cycles. At the same time, they also found that the thickness of the silicon alloy anode affected its cycle performance. When the thickness of the Mg Si film anode was 30nm, its cycle performance was the best.

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