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At present, the research direction of inorganic all solid-state thin film lithium-ion batteries is urgently divided into: (1) developing new battery structures to improve the capacity and discharge power per unit area of the battery, and addressing the problem of low capacity and power per unit area of thin film lithium-ion batteries; (2) researching new solid-state electrolytes with high ion conductivity to address the problem of low lithium ion conductivity in inorganic solid-state electrolytes; (3) researching new positive and negative electrodes to improve the positive and negative electrodes after film formation The negative electrode has more

1. Research on the Structure of Thin Film Lithium Ion Batteries

Thin film lithium-ion batteries adopt a classic stacked structure, which is simple in structure and easy to produce. However, in order to further improve the performance of batteries, research on the structure of thin film lithium-ion batteries is gradually increasing, especially 3D structured thin film lithium-ion batteries, which have become a research hotspot due to their good performance expectations. The 3D structure of thin film lithium-ion batteries is similar to that of porous 3D batteries. This type of battery produces many well arranged micropores on a silicon substrate, in which a Li diffusion barrier layer TiN is deposited. Then, the battery is made with silicon as the negative electrode, LiPON as the electrolyte, and LiCoO2 as the positive electrode.

2. Research on Inorganic Solid Electrolytes

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